% Scatterometer Optics Chain Model                                                                                                                                                          
% Author: A. Gretarsson, Jan. 2010.                                                                                                                                                         
% Length Unit: millimeters                                                                                                                                                                  
%                                                                                                                                                                                           
% Position                                     Optic                                          Values                                         Program Control                                
%                                                                                                                                                                                           
0                                              index                                          1                                                                                             
0                                              lambda                                         0.001064                                       pref                                           
0                                              q                                              0  80.8243                                                                                    
0                                              opticdiam                                      12.5                                                                                          
0                                              mode                                           0 0                                                                                           
740.8                                          lens                                           200                                                                                           
924.8                                          lens                                           -100                                           profile                                        
1349.8                                         cavityR                                        800 -1.8748e-4 Inf   1000   0.9487   0.9899    push profile                                   
1349.8                                         cavityT                                                                                       profile                                        
1349.8                                         cavityI                                                                                       profile                                        
2500                                           lens                                           -250                                                                                          
2700                                           window                                          1.46 30                                       push                                           
3000                                           beamstop                                                                                                                                     
%                                                                                                                                                                                           
2770                                           cavityT                                        200 0 Inf 1000 0.9 0.99                        down pop                                       
3300                                           lens                                           50                                                                                            
3500                                           beamstop                                                                                                                                     
%                                                                                                                                                                                           
2500                                           lens                                           100                                            up up pop                                      
2600                                           lens                                           300                                                                                           
2800                                           lens                                           100                                                                                           
3500                                           beamstop